Effect of Fluorine Content on Structure and Tribological Properties of Diamond-like Carbon Films

WEI Li, ZHANG Bin, CAO Zhong-yue, ZHANG Jun-yan

China Surface Engineering ›› 2013, Vol. 26 ›› Issue (2) : 66-71.

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PDF(3197 KB)
China Surface Engineering ›› 2013, Vol. 26 ›› Issue (2) : 66-71.

Effect of Fluorine Content on Structure and Tribological Properties of Diamond-like Carbon Films

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2013, 26(2): 66-71

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ISSN 1007-9289　CN 11-3905/TG
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Sponsored by: Chinese Mechanical Engineering Society
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