Preparation of TiN Thin Films by DC Reactive Magnetron Sputtering

WANG You-xin1, MAO Ming-xu1, WANG Ying-cai1, SHAN Yu-qiao2

China Surface Engineering ›› 2013, Vol. 26 ›› Issue (2) : 61-65.

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China Surface Engineering ›› 2013, Vol. 26 ›› Issue (2) : 61-65.

Preparation of TiN Thin Films by DC Reactive Magnetron Sputtering

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2013, 26(2): 61-65

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ISSN 1007-9289　CN 11-3905/TG
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