TiN/TiO2 Periodic Films Prepared by Magnetron Sputtering

LIU Ying, HU Yun-long

China Surface Engineering ›› 2013, Vol. 26 ›› Issue (2) : 56-60.

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PDF(1782 KB)
China Surface Engineering ›› 2013, Vol. 26 ›› Issue (2) : 56-60.

TiN/TiO2 Periodic Films Prepared by Magnetron Sputtering

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2013, 26(2): 56-60

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ISSN 1007-9289　CN 11-3905/TG
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