Effects of Target to Substrate Distance on Microstructure and Tribological Properties of Pulsed Laser Deposited CNx Films

SONG Jian-qiang1, ZHENG Xiao-hua1, YANG Fang-er1, CHEN Le-sheng2, ZHENG Jin-xiang1, SHEN Tao1

China Surface Engineering ›› 2013, Vol. 26 ›› Issue (1) : 63-68.

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China Surface Engineering ›› 2013, Vol. 26 ›› Issue (1) : 63-68.

Effects of Target to Substrate Distance on Microstructure and Tribological Properties of Pulsed Laser Deposited CNx Films

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2013, 26(1): 63-68

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ISSN 1007-9289　CN 11-3905/TG
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Sponsored by: Chinese Mechanical Engineering Society
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