Hysteretic Process of Aluminium Oxide Films Deposited by Reactive Sputtering Method

XU Hua-bing1, XU Xiang-kun2

China Surface Engineering ›› 2013, Vol. 26 ›› Issue (1) : 40-44.

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China Surface Engineering ›› 2013, Vol. 26 ›› Issue (1) : 40-44.

Hysteretic Process of Aluminium Oxide Films Deposited by Reactive Sputtering Method

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2013, 26(1): 40-44

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ISSN 1007-9289　CN 11-3905/TG
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Sponsored by: Chinese Mechanical Engineering Society
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