Properties of the Silicon Dioxide Films Fabricated by DC Reactive Magnetron Sputtering

ZHANG Jian, CHEN Wen-ge

China Surface Engineering ›› 2013, Vol. 26 ›› Issue (1) : 34-39.

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China Surface Engineering ›› 2013, Vol. 26 ›› Issue (1) : 34-39.

Properties of the Silicon Dioxide Films Fabricated by DC Reactive Magnetron Sputtering

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2013, 26(1): 34-39

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ISSN 1007-9289　CN 11-3905/TG
Supervised by: China Association for Science and Technology
Sponsored by: Chinese Mechanical Engineering Society
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