Preparation of AZO Thin Films on PET Substrate Using DC Magnetron Sputtering

WANG Cui-feng1, CHIOU Shi-yung2， JHAO Yi-syuan2， OU Keng-liang3

China Surface Engineering ›› 2012, Vol. 25 ›› Issue (6) : 53-60.

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China Surface Engineering ›› 2012, Vol. 25 ›› Issue (6) : 53-60.

Preparation of AZO Thin Films on PET Substrate Using DC Magnetron Sputtering

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2012, 25(6): 53-60

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ISSN 1007-9289　CN 11-3905/TG
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Sponsored by: Chinese Mechanical Engineering Society
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