Preparation and Characterization of Hydrogen Containing Sidoped DLC Film

HU Fang, DAI Ming-jiang, LIN Song-sheng, LUO Shun, HOU Hui-jun, SHI Qian, WEI Chun-bei

China Surface Engineering ›› 2012, Vol. 25 ›› Issue (6) : 47-52.

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China Surface Engineering ›› 2012, Vol. 25 ›› Issue (6) : 47-52.

Preparation and Characterization of Hydrogen Containing Sidoped DLC Film

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2012, 25(6): 47-52

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ISSN 1007-9289　CN 11-3905/TG
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Sponsored by: Chinese Mechanical Engineering Society
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