Progress in Deposition Principle and Process Characteristics of High Power Pulse Magnetron Sputtering

WU Zhili, ZHU Xiaopeng, LEI Mingkai

China Surface Engineering ›› 2012, Vol. 25 ›› Issue (5) : 15-20.

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China Surface Engineering ›› 2012, Vol. 25 ›› Issue (5) : 15-20.

Progress in Deposition Principle and Process Characteristics of High Power Pulse Magnetron Sputtering

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2012, 25(5): 15-20

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ISSN 1007-9289　CN 11-3905/TG
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