Effect of SiC Target Power Density on Tribological Properties of Nonhydrogenated Silicon Doped Diamondlike Carbon Film

ZHANG He-yong1,2, DAI Ming-jiang2, HU Fang2, WEI Cun-bei2, LIN Song-sheng2, HOU Hui-jun2

China Surface Engineering ›› 2012, Vol. 25 ›› Issue (2) : 37-42.

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China Surface Engineering ›› 2012, Vol. 25 ›› Issue (2) : 37-42.

Effect of SiC Target Power Density on Tribological Properties of Nonhydrogenated Silicon Doped Diamondlike Carbon Film

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2012, 25(2): 37-42

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ISSN 1007-9289　CN 11-3905/TG
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Sponsored by: Chinese Mechanical Engineering Society
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