Structure and Mechanical Performance of （Al,Ti）N Periodical Multilayer Films Deposited by MF Magnetron Sputtering

SUN Li–li1, YANG Hui–sheng2, CHENG Hao1, WANG Ai–ying1

China Surface Engineering ›› 2011, Vol. 24 ›› Issue (6) : 47-52.

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China Surface Engineering ›› 2011, Vol. 24 ›› Issue (6) : 47-52.

Structure and Mechanical Performance of （Al,Ti）N Periodical Multilayer Films Deposited by MF Magnetron Sputtering

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2011, 24(6): 47-52

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ISSN 1007-9289　CN 11-3905/TG
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