Control the Microstructure of Tungsten Layer Fabricated by Chemical Vapor Deposition

MA Jie, ZHANG Yong–zhi, WEI Jian–zhong, MENG Li–juan

China Surface Engineering ›› 2011, Vol. 24 ›› Issue (6) : 24-27.

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China Surface Engineering ›› 2011, Vol. 24 ›› Issue (6) : 24-27.

Control the Microstructure of Tungsten Layer Fabricated by Chemical Vapor Deposition

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2011, 24(6): 24-27

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ISSN 1007-9289　CN 11-3905/TG
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Sponsored by: Chinese Mechanical Engineering Society
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