Influence of Nitrogen Flows on Properties of CrAlN Film Prepared by Mid–frequency Unbalanced Magnetron Sputtering

LV Yan–hong1,2, KONG Qing–hua1,2, JI Li1, LI Hong–xuan1, LIU Xiao–hong1, CHEN Jian–min1, ZHOU Hui–di1

China Surface Engineering ›› 2011, Vol. 24 ›› Issue (4) : 7-12.

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China Surface Engineering ›› 2011, Vol. 24 ›› Issue (4) : 7-12.

Influence of Nitrogen Flows on Properties of CrAlN Film Prepared by Mid–frequency Unbalanced Magnetron Sputtering

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2011, 24(4): 7-12

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ISSN 1007-9289　CN 11-3905/TG
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Sponsored by: Chinese Mechanical Engineering Society
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