Microstructure and Tribological Properties of Graphitelike Carbon Film Prepared by Unbalanced Magnetron Sputtering

WANG Yong-jun1,2, LI Hong-xuan1, JI Li1, LIU Xiao-hong1, WU Yan-xia1,2, ZHOU Hui-di1, CHEN Jian-min1

China Surface Engineering ›› 2011, Vol. 24 ›› Issue (3) : 17-22.

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PDF(4878 KB)
China Surface Engineering ›› 2011, Vol. 24 ›› Issue (3) : 17-22.

Microstructure and Tribological Properties of Graphitelike Carbon Film Prepared by Unbalanced Magnetron Sputtering

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ISSN 1007-9289　CN 11-3905/TG
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