The Contact Resistance and Corrosion Resistance of CrNx Film Deposited by Magnetron Sputtering

TAN Juna, XING Ru–xinb, QIAN Yao–chuanb

China Surface Engineering ›› 2010, Vol. 23 ›› Issue (6) : 30-33.

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China Surface Engineering ›› 2010, Vol. 23 ›› Issue (6) : 30-33.

The Contact Resistance and Corrosion Resistance of CrNx Film Deposited by Magnetron Sputtering

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2010, 23(6): 30-33

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ISSN 1007-9289　CN 11-3905/TG
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