Effect of Substrate Bias on Structure and Properties of Ta–C Films

CAI Jian, YANG Wei, DAI Wei, KE Pei–ling, WANG Ai–ying

China Surface Engineering ›› 2010, Vol. 23 ›› Issue (4) : 48-51.

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China Surface Engineering ›› 2010, Vol. 23 ›› Issue (4) : 48-51.

Effect of Substrate Bias on Structure and Properties of Ta–C Films

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2010, 23(4): 48-51

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ISSN 1007-9289　CN 11-3905/TG
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