Preparation and Characterization of Si–doped Diamond–like Carbon Films

ZHAO Fei1,2, LI Hong–xuan1, JI Li1, QUAN Wei–long1,2, ZHOU Hui–di1, CHEN Jian–min1

China Surface Engineering ›› 2010, Vol. 23 ›› Issue (4) : 11-14.

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PDF(636 KB)
China Surface Engineering ›› 2010, Vol. 23 ›› Issue (4) : 11-14.

Preparation and Characterization of Si–doped Diamond–like Carbon Films

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