Effect of Nitrogen Partial Pressure on Structure and Properties of AlN/Al Protective Coatings on NdFeB by DC Magnetron Sputtering

LI Jin-long,MAO Shou-dong,SUN Ke-fei,SONG Zhen-lun

China Surface Engineering ›› 2010, Vol. 23 ›› Issue (3) : 80-83.

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China Surface Engineering ›› 2010, Vol. 23 ›› Issue (3) : 80-83.

Effect of Nitrogen Partial Pressure on Structure and Properties of AlN/Al Protective Coatings on NdFeB by DC Magnetron Sputtering

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2010, 23(3): 80-83

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ISSN 1007-9289　CN 11-3905/TG
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