Influences of Sputtering Parameters on the Composition and Microstructure of CuInGa Precursors

LI Chun-lei,ZHUANG Da-ming,ZHANG Gong,SONG Jun

China Surface Engineering ›› 2010, Vol. 23 ›› Issue (3) : 25-28.

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PDF(364 KB)
China Surface Engineering ›› 2010, Vol. 23 ›› Issue (3) : 25-28.

Influences of Sputtering Parameters on the Composition and Microstructure of CuInGa Precursors

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2010, 23(3): 25-28

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ISSN 1007-9289　CN 11-3905/TG
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Sponsored by: Chinese Mechanical Engineering Society
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