The Development and Key Problems of Plasma Immersion Ion Implantation and Deposition

WANG Lang–ping, WANG Xiao–feng, TANG Bao–yin

China Surface Engineering ›› 2010, Vol. 23 ›› Issue (1) : 9-14.

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China Surface Engineering ›› 2010, Vol. 23 ›› Issue (1) : 9-14.

The Development and Key Problems of Plasma Immersion Ion Implantation and Deposition

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2010, 23(1): 9-14

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ISSN 1007-9289　CN 11-3905/TG
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Sponsored by: Chinese Mechanical Engineering Society
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