Observation Test and Comparison of Cathodic-Arc TiN Film

DONG Qi, TIAN Kai, HU Zhong–jun, WU Zhen

China Surface Engineering ›› 2010, Vol. 23 ›› Issue (1) : 63-68.

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China Surface Engineering ›› 2010, Vol. 23 ›› Issue (1) : 63-68.

Observation Test and Comparison of Cathodic-Arc TiN Film

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ISSN 1007-9289　CN 11-3905/TG
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