Mechanical Properties of (Ti,Al)N Films Deposited by Reactive Magnetron Sputtering

ZHOU Tao, NIE Pu–lin, LI Zhu–guo, HUANG Jian, CAI Xun

China Surface Engineering ›› 2010, Vol. 23 ›› Issue (1) : 34-38.

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China Surface Engineering ›› 2010, Vol. 23 ›› Issue (1) : 34-38.

Mechanical Properties of (Ti,Al)N Films Deposited by Reactive Magnetron Sputtering

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2010, 23(1): 34-38

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ISSN 1007-9289　CN 11-3905/TG
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