Al-doped ZnO (ZAO) Films Prepared by Middle-frequency Alternative Magnetron Sputtering

LIU Jiang, ZHUANG Da?ming, ZHANG Gong, LI Chun?lei, DUAN Yu?bo

China Surface Engineering ›› 2010, Vol. 23 ›› Issue (1) : 15-18.

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China Surface Engineering ›› 2010, Vol. 23 ›› Issue (1) : 15-18.

Al-doped ZnO (ZAO) Films Prepared by Middle-frequency Alternative Magnetron Sputtering

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2010, 23(1): 15-18

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ISSN 1007-9289　CN 11-3905/TG
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