偏压和氮分压对TiN膜层结构和膜/基体系性能的影响

China Surface Engineering ›› 2009, Vol. 22 ›› Issue (2) : 20-25.

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China Surface Engineering ›› 2009, Vol. 22 ›› Issue (2) : 20-25.

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ISSN 1007-9289　CN 11-3905/TG
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Sponsored by: Chinese Mechanical Engineering Society
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