等离子增强磁控溅射Ti-Si—C-N基纳米复合膜层耐冲蚀性能研究

China Surface Engineering ›› 2009, Vol. 22 ›› Issue (1) : 1-10.

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China Surface Engineering ›› 2009, Vol. 22 ›› Issue (1) : 1-10.

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ISSN 1007-9289　CN 11-3905/TG
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Sponsored by: Chinese Mechanical Engineering Society
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