The Microstructure and Analysis of Graphite-like Carbon Film Deposited by Unbalanced Magnetron Sputtering Technique

YIN Qing-jun,JIANG Bai-ling,CHEN Di-chun,ZHANG Guo-jun

China Surface Engineering ›› 2007, Vol. 20 ›› Issue (2) : 42-46.

China Surface Engineering ›› 2007, Vol. 20 ›› Issue (2) : 42-46.

The Microstructure and Analysis of Graphite-like Carbon Film Deposited by Unbalanced Magnetron Sputtering Technique

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2007, 20(2): 42-46

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ISSN 1007-9289　CN 11-3905/TG
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Sponsored by: Chinese Mechanical Engineering Society
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