
The Properties of DLC Hard Film Prepared by Combining Unbalanced Magnetron Sputtering with Arc Plating
YU Da-yang1 , MA Sheng-ge2, ZHANG Yi-chen1 , XU Lu2
China Surface Engineering ›› 2006, Vol. 19 ›› Issue (6) : 43-46.
The Properties of DLC Hard Film Prepared by Combining Unbalanced Magnetron Sputtering with Arc Plating
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