The Properties of DLC Hard Film Prepared by Combining Unbalanced Magnetron Sputtering with Arc Plating

YU Da-yang1 , MA Sheng-ge2, ZHANG Yi-chen1 , XU Lu2

China Surface Engineering ›› 2006, Vol. 19 ›› Issue (6) : 43-46.

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PDF(271 KB)
China Surface Engineering ›› 2006, Vol. 19 ›› Issue (6) : 43-46.

The Properties of DLC Hard Film Prepared by Combining Unbalanced Magnetron Sputtering with Arc Plating

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2006, 19(6): 43-46

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ISSN 1007-9289　CN 11-3905/TG
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Sponsored by: Chinese Mechanical Engineering Society
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