Defects in TiN Films Prepared by Arc Ion Plating and Their Formation Reasons

SHI Xin-wei1，QIU Wan-qi2，LIU Zheng-yi2

China Surface Engineering ›› 2006, Vol. 19 ›› Issue (1) : 43-46.

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PDF(420 KB)
China Surface Engineering ›› 2006, Vol. 19 ›› Issue (1) : 43-46.

Defects in TiN Films Prepared by Arc Ion Plating and Their Formation Reasons

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2006, 19(1): 43-46

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ISSN 1007-9289　CN 11-3905/TG
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Sponsored by: Chinese Mechanical Engineering Society
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