A Comparison of the Tribological Properties Between Low Temperature Magnetic Sputtering and Multi-arc Ion Plating TiN Films

BAI Xiu-qin 1,2, LI Jian 1

China Surface Engineering ›› 2006, Vol. 19 ›› Issue (1) : 12-15.

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PDF(197 KB)
China Surface Engineering ›› 2006, Vol. 19 ›› Issue (1) : 12-15.

A Comparison of the Tribological Properties Between Low Temperature Magnetic Sputtering and Multi-arc Ion Plating TiN Films

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2006, 19(1): 12-15

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ISSN 1007-9289　CN 11-3905/TG
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Sponsored by: Chinese Mechanical Engineering Society
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