PDF(244 KB)
Effect of Negative Bias Voltage on the Surface Properties of Low Temperature Deposition TiN Films
BAI Xiu-qin 1,2, LI Jian 1
China Surface Engineering ›› 2005, Vol. 18 ›› Issue (5) : 20-23.
PDF(244 KB)
PDF(244 KB)
Effect of Negative Bias Voltage on the Surface Properties of Low Temperature Deposition TiN Films
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