Research on The 10 kV Solid-state Pulse Modulator for Plasma Immersion ion Implantation

Tang Baoyin1,Gan Kongyin1,Wang Langpin1,Wang Xiaofeng1,Wang Shongyan1,Wu Hongcheng2

China Surface Engineering ›› 2003, Vol. 16 ›› Issue (4) : 34-38.

China Surface Engineering ›› 2003, Vol. 16 ›› Issue (4) : 34-38.

Research on The 10 kV Solid-state Pulse Modulator for Plasma Immersion ion Implantation

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2003, 16(4): 34-38

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ISSN 1007-9289　CN 11-3905/TG
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