The Preparation and Characterization of Cubic Boron Nitride Thin Films

TAN Jun,CAI Zhi-hai,ZHANG Ping,TANG Yun

China Surface Engineering ›› 2002, Vol. 15 ›› Issue (2) : 16-20.

China Surface Engineering ›› 2002, Vol. 15 ›› Issue (2) : 16-20.

The Preparation and Characterization of Cubic Boron Nitride Thin Films

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2002, 15(2): 16-20

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ISSN 1007-9289　CN 11-3905/TG
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Sponsored by: Chinese Mechanical Engineering Society
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