The Analysis of Micro-structure and Mechanical behavior of Nano-diamond Films produced by Microwave Plasma Chemical Vapor Deposition

Yang Wubao,Lu Fanxiu,Tang Weizhong,Liu Yulong,Zhu Ke

China Surface Engineering ›› 2000, Vol. 13 ›› Issue (4) : 19-21.

China Surface Engineering ›› 2000, Vol. 13 ›› Issue (4) : 19-21.

The Analysis of Micro-structure and Mechanical behavior of Nano-diamond Films produced by Microwave Plasma Chemical Vapor Deposition

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2000, 13(4): 19-21

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ISSN 1007-9289　CN 11-3905/TG
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Sponsored by: Chinese Mechanical Engineering Society
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