Influence of Deposition Time on Structure and Thermal Fatigue Property of Molybdenum Film

ZHU Xiaogang, WANG Bo, ZHANG Lixia, YU Dunbo, YANG Yuanfei

China Surface Engineering ›› 2014, Vol. 27 ›› Issue (3) : 10-14.

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China Surface Engineering ›› 2014, Vol. 27 ›› Issue (3) : 10-14. DOI: 10.3969/j.issn.1007-9289.2014.03.002

Influence of Deposition Time on Structure and Thermal Fatigue Property of Molybdenum Film

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2014, 27(3): 10-14 https://doi.org/10.3969/j.issn.1007-9289.2014.03.002

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