Effect of Ethanol on the Rate Selectivity of Copper Film Concave Position and Convex Position in the CMP Process with Low Abrasive Concentration

doi:10.3969/j.issn.1007-9289.2014.02.016

LI Yan, LIU Yuling, BU Xiaofeng, WANG Aochen

China Surface Engineering ›› 2014, Vol. 27 ›› Issue (2) : 95-101.

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China Surface Engineering ›› 2014, Vol. 27 ›› Issue (2) : 95-101. DOI: 10.3969/j.issn.1007-9289.2014.02.016

Effect of Ethanol on the Rate Selectivity of Copper Film Concave Position and Convex Position in the CMP Process with Low Abrasive Concentration

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2014, 27(2): 95-101 https://doi.org/10.3969/j.issn.1007-9289.2014.02.016

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ISSN 1007-9289　CN 11-3905/TG
Supervised by: China Association for Science and Technology
Sponsored by: Chinese Mechanical Engineering Society
Edited and Published by: Editorial Office of China Surface Engineering

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