Effects of Oxygen Plasma on Surface Wettability of Porous Silicon

JIANG Lei, LI Zhaomin, YANG Limin, LI Songyan, SUN Qian, ZHANG Dong, WANG Jiqian

China Surface Engineering ›› 2013, Vol. 26 ›› Issue (5) : 43-48.

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China Surface Engineering ›› 2013, Vol. 26 ›› Issue (5) : 43-48. DOI: 10.3969/j.issn.1007-9289.2013.05.008

Effects of Oxygen Plasma on Surface Wettability of Porous Silicon

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2013, 26(5): 43-48 https://doi.org/10.3969/j.issn.1007-9289.2013.05.008

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