Effects of Gas Pressure on Microstructure and Properties of Diamondlike Carbon Films

doi:10.3969/j.issn.1007-9289.2013.05.006

SU Yongyao, ZHAO Lining, WANG Jinbiao, TU Mingjing, LI Xueyuan, YANG Wenmao

China Surface Engineering ›› 2013, Vol. 26 ›› Issue (5) : 31-36.

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China Surface Engineering ›› 2013, Vol. 26 ›› Issue (5) : 31-36. DOI: 10.3969/j.issn.1007-9289.2013.05.006

Effects of Gas Pressure on Microstructure and Properties of Diamondlike Carbon Films

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2013, 26(5): 31-36 https://doi.org/10.3969/j.issn.1007-9289.2013.05.006

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ISSN 1007-9289　CN 11-3905/TG
Supervised by: China Association for Science and Technology
Sponsored by: Chinese Mechanical Engineering Society
Edited and Published by: Editorial Office of China Surface Engineering

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