Development and Challenges of Surface Planarization Technology for Single Crystalline Diamond

YANG Kuo, CHAI Zhimin, DAI Yuanjing, LIU Yuhong, LU Xinchun

China Surface Engineering ›› 2025, Vol. 38 ›› Issue (5) : 1-33.

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China Surface Engineering ›› 2025, Vol. 38 ›› Issue (5) : 1-33. DOI: 10.11933/j.issn.1007-9289.20250415001

Development and Challenges of Surface Planarization Technology for Single Crystalline Diamond

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2025, 38(5): 1-33 https://doi.org/10.11933/j.issn.1007-9289.20250415001

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