Effect of N Content on the Structure and Mechanical Properties of Multicomponent ZrNbMoTaW Thin Films

DAI Qiyang, XU Yuxiang, DAI Wei, WANG Qimin

China Surface Engineering ›› 2025, Vol. 38 ›› Issue (2) : 80-89.

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China Surface Engineering ›› 2025, Vol. 38 ›› Issue (2) : 80-89. DOI: 10.11933/j.issn.1007-9289.20250103002

Effect of N Content on the Structure and Mechanical Properties of Multicomponent ZrNbMoTaW Thin Films

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2025, 38(2): 80-89 https://doi.org/10.11933/j.issn.1007-9289.20250103002

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ISSN 1007-9289　CN 11-3905/TG
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Sponsored by: Chinese Mechanical Engineering Society
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