Development and Challenges of Gas Cluster Ion Beam Technology

XIE Yuan, XIE Kege, DENG Hui

China Surface Engineering ›› 2025, Vol. 38 ›› Issue (2) : 217-232.

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China Surface Engineering ›› 2025, Vol. 38 ›› Issue (2) : 217-232. DOI: 10.11933/j.issn.1007-9289.20240909002

Development and Challenges of Gas Cluster Ion Beam Technology

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2025, 38(2): 217-232 https://doi.org/10.11933/j.issn.1007-9289.20240909002

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ISSN 1007-9289　CN 11-3905/TG
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