Effect of Synchronous Pulsed-bias on Structure and Mechanical Properties of DLC Films by HiPIMS Technique

LI Qigang, CHEN Rende, LI Hao, WANG Zhenyu, GUO Peng, CUI Li, WANG Liang, WANG Aiying

China Surface Engineering ›› 2025, Vol. 38 ›› Issue (2) : 233-244.

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China Surface Engineering ›› 2025, Vol. 38 ›› Issue (2) : 233-244. DOI: 10.11933/j.issn.1007-9289.20231126001

Effect of Synchronous Pulsed-bias on Structure and Mechanical Properties of DLC Films by HiPIMS Technique

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2025, 38(2): 233-244 https://doi.org/10.11933/j.issn.1007-9289.20231126001

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ISSN 1007-9289　CN 11-3905/TG
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