Effect of N2 Flow Rates on the Microstructure and Mechanical Property of SiNx Films Prepared by HiPIMS

doi:10.11933/j.issn.1007-9289.20230920003

Effect of N₂ Flow Rates on the Microstructure and Mechanical Property of SiN_x Films Prepared by HiPIMS

ZHU Yongming, ZHANG Bin

China Surface Engineering ›› 2025, Vol. 38 ›› Issue (2) : 245-254.

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China Surface Engineering ›› 2025, Vol. 38 ›› Issue (2) : 245-254. DOI: 10.11933/j.issn.1007-9289.20230920003

Effect of N₂ Flow Rates on the Microstructure and Mechanical Property of SiN_x Films Prepared by HiPIMS

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2025, 38(2): 245-254 https://doi.org/10.11933/j.issn.1007-9289.20230920003

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ISSN 1007-9289　CN 11-3905/TG
Supervised by: China Association for Science and Technology
Sponsored by: Chinese Mechanical Engineering Society
Edited and Published by: Editorial Office of China Surface Engineering

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Received	Revised	Accepted	Published
2023-09-20	2023-10-24	2023-10-24	2025-04-23
Issue Date
2025-06-26

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