Analysis of Microchannel Structure on Jet Uniformity of PECVD Showerhead

doi:10.11933/j.issn.1007-9289.20221202001

LIU Wansuo, YUE Xiangji, LIN Zeng

China Surface Engineering ›› 2023, Vol. 36 ›› Issue (5) : 222-233.

PDF(5219 KB)

China Surface Engineering ›› 2023, Vol. 36 ›› Issue (5) : 222-233. DOI: 10.11933/j.issn.1007-9289.20221202001

Analysis of Microchannel Structure on Jet Uniformity of PECVD Showerhead

{{article.zuoZhe_EN}}

Author information +

History +

HeighLight

Abstract

Key words

QR code of this article

Cite this article

EndNote

Ris (Procite)

Bibtex

Download Citations

{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2023, 36(5): 222-233 https://doi.org/10.11933/j.issn.1007-9289.20221202001

References

Publishing order | Descend order by publishing year | Descend order by cited within

References

Funding

RIGHTS & PERMISSIONS

PDF(5219 KB)

Accesses

Citation

Detail

Sections

Recommended

ISSN 1007-9289　CN 11-3905/TG
Supervised by: China Association for Science and Technology
Sponsored by: Chinese Mechanical Engineering Society
Edited and Published by: Editorial Office of China Surface Engineering

Visited

Total visitors:　
Visitors of today: 　
Now online:

Please choose a citation manager

Content to export