Experiment on the Effect of Polishing Pad Surface Microstructure on Polishing Performance

doi:10.11933/j.issn.1007-9289.20220720002

XIONG Qiang, CAI Weiming, LU Jiabin, LIU Wentao, LI Weizhong

China Surface Engineering ›› 2023, Vol. 36 ›› Issue (2) : 200-211.

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China Surface Engineering ›› 2023, Vol. 36 ›› Issue (2) : 200-211. DOI: 10.11933/j.issn.1007-9289.20220720002

Experiment on the Effect of Polishing Pad Surface Microstructure on Polishing Performance

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2023, 36(2): 200-211 https://doi.org/10.11933/j.issn.1007-9289.20220720002

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ISSN 1007-9289　CN 11-3905/TG
Supervised by: China Association for Science and Technology
Sponsored by: Chinese Mechanical Engineering Society
Edited and Published by: Editorial Office of China Surface Engineering

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