Research Progress in Residual Stress Modulation of Diamond-like Carbon Film

doi:10.11933/j.issn.1007-9289.20220629002

DU Naizhou, FU Zhimin, FENG Cun’ao, GUO Peng, LI Xiaowei

China Surface Engineering ›› 2024, Vol. 37 ›› Issue (5) : 238-252.

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China Surface Engineering ›› 2024, Vol. 37 ›› Issue (5) : 238-252. DOI: 10.11933/j.issn.1007-9289.20220629002

Research Progress in Residual Stress Modulation of Diamond-like Carbon Film

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2024, 37(5): 238-252 https://doi.org/10.11933/j.issn.1007-9289.20220629002

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ISSN 1007-9289　CN 11-3905/TG
Supervised by: China Association for Science and Technology
Sponsored by: Chinese Mechanical Engineering Society
Edited and Published by: Editorial Office of China Surface Engineering

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Received	Revised	Published
2022-06-29	2023-08-23	2024-10-20
Issue Date
2024-10-20

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