Measurement of Fracture Toughness of TiAlN Thin Film by Micro Indentation Based on Digital Twin

JIANG Zhitao, GAO Jianying, LEI Mingkai

China Surface Engineering ›› 2022, Vol. 35 ›› Issue (5) : 172-183.

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China Surface Engineering ›› 2022, Vol. 35 ›› Issue (5) : 172-183. DOI: 10.11933/j.issn.1007-9289.20220601001

Measurement of Fracture Toughness of TiAlN Thin Film by Micro Indentation Based on Digital Twin

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2022, 35(5): 172-183 https://doi.org/10.11933/j.issn.1007-9289.20220601001

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