Growth and Properties of Diamond Films on Si<sub>3</sub>N<sub>4</sub> Ceramic Substrates

doi:10.11933/j.issn.1007-9289.20220518001

Growth and Properties of Diamond Films on Si₃N₄ Ceramic Substrates

WU Yuhou, YANG Miao, YAN Guangyu, WANG He, LIU Lusheng, BAI Xu, ZHANG Huisen

China Surface Engineering ›› 2024, Vol. 37 ›› Issue (1) : 179-191.

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China Surface Engineering ›› 2024, Vol. 37 ›› Issue (1) : 179-191. DOI: 10.11933/j.issn.1007-9289.20220518001

Growth and Properties of Diamond Films on Si₃N₄ Ceramic Substrates

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2024, 37(1): 179-191 https://doi.org/10.11933/j.issn.1007-9289.20220518001

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ISSN 1007-9289　CN 11-3905/TG
Supervised by: China Association for Science and Technology
Sponsored by: Chinese Mechanical Engineering Society
Edited and Published by: Editorial Office of China Surface Engineering

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Received	Revised	Published
2022-05-18	2022-11-21	2024-02-20
Issue Date
2024-02-20

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