CrAl Target Discharge Behavior of Electric and Magnetic Fields Synergistically Enhancing HiPIMS and Preparation of CrAlN Film

doi:10.11933/j.issn.1007-9289.20220115001

LI Chunwei^{1,2, TIAN Xiubo}

China Surface Engineering ›› 2022, Vol. 35 ›› Issue (5) : 155-162.

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China Surface Engineering ›› 2022, Vol. 35 ›› Issue (5) : 155-162. DOI: 10.11933/j.issn.1007-9289.20220115001

CrAl Target Discharge Behavior of Electric and Magnetic Fields Synergistically Enhancing HiPIMS and Preparation of CrAlN Film

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2022, 35(5): 155-162 https://doi.org/10.11933/j.issn.1007-9289.20220115001

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ISSN 1007-9289　CN 11-3905/TG
Supervised by: China Association for Science and Technology
Sponsored by: Chinese Mechanical Engineering Society
Edited and Published by: Editorial Office of China Surface Engineering

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