
Plasma Discharge Characteristics and Microstructure of CrNx Coating Deposited by Reactive HiPIMS
QI Yuxing, ZHOU Guangxue, ZUO Xiao1, DU Hong, CHEN Rende, WANG Aiying
China Surface Engineering ›› 2022, Vol. 35 ›› Issue (5) : 184-191.
Plasma Discharge Characteristics and Microstructure of CrNx Coating Deposited by Reactive HiPIMS
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