Plasma Discharge Characteristics and Microstructure of CrNx Coating Deposited by Reactive HiPIMS

QI Yuxing, ZHOU Guangxue, ZUO Xiao1, DU Hong, CHEN Rende, WANG Aiying

China Surface Engineering ›› 2022, Vol. 35 ›› Issue (5) : 184-191.

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China Surface Engineering ›› 2022, Vol. 35 ›› Issue (5) : 184-191. DOI: 10.11933/j.issn.1007-9289.20220104002

Plasma Discharge Characteristics and Microstructure of CrNx Coating Deposited by Reactive HiPIMS

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2022, 35(5): 184-191 https://doi.org/10.11933/j.issn.1007-9289.20220104002

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