Effects of Pulse Frequency on the Microstructure and Mechanical Property of TiN Films Prepared by HiPIMS

doi:10.11933/j.issn.1007-9289.20220103002

GAO Haiyang, ZHANG Bin, WEI Dianzhong, DAN Min, JIN Fanya

China Surface Engineering ›› 2022, Vol. 35 ›› Issue (5) : 192-199.

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China Surface Engineering ›› 2022, Vol. 35 ›› Issue (5) : 192-199. DOI: 10.11933/j.issn.1007-9289.20220103002

Effects of Pulse Frequency on the Microstructure and Mechanical Property of TiN Films Prepared by HiPIMS

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2022, 35(5): 192-199 https://doi.org/10.11933/j.issn.1007-9289.20220103002

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ISSN 1007-9289　CN 11-3905/TG
Supervised by: China Association for Science and Technology
Sponsored by: Chinese Mechanical Engineering Society
Edited and Published by: Editorial Office of China Surface Engineering

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